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|a Smart materials fabrication and materials for micro-elctro-mechanical systems :
|b symposium held April 28-30, 1992, San Francisco, California, U.S.A. /
|c editors, A. Peter Jardine ... [et al.].
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| 260 |
# |
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|a Philadelphia, Pa. :
|b Materials Research Society,
|c c1992.
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| 300 |
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|a xi, 317 p. :
|b il. ;
|c 24 cm.
|
| 490 |
0 |
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|a Materials Research Society symposium proceedings,
|x 0272-9172 ;
|v v. 276
|
| 504 |
# |
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|a Incluye referencias bibliográficas e índices.
|
| 020 |
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|a 1558991719
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| 700 |
1 |
# |
|a Jardine, A. Peter.
|4 edt
|
| 080 |
# |
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|a 620.1:061.3
|
| 650 |
# |
0 |
|a Smart materials
|v Congresses.
|
| 650 |
# |
0 |
|a Electromechanical devices
|x Materials
|v Congresses.
|
| 650 |
# |
0 |
|a Microelectronics
|x Materials
|v Congresses.
|
| 650 |
# |
7 |
|a Microelectrónica
|v Congresos.
|2 inist
|
| 650 |
# |
7 |
|a Electromecánica
|v Congresos.
|2 inist
|
| 040 |
# |
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|a DLC
|c DLC
|d OCL
|b spa
|d arbccab
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| 942 |
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|c BK
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| 952 |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 15527
|o 620.1:061.3 S68 1992
|p 15527
|t 1
|y BK
|
