Silicon device processing ; proceedings /

Guardado en:
Detalles Bibliográficos
Autor principal: Symposium on Silicon Device Processing (1970 : Gaithersburg, Md.)
Autor Corporativo: Symposium on Silicon Device Processing
Otros Autores: Marsden, Charles P., ed., American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics.
Formato: Libro
Lenguaje:
Publicado: Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.
Colección:NBS special publication ; 337
Materias:
Descripción
Notas:"A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
Descripción Física:x, 457 p. : il. ; 27 cm.
Bibliografía:Incluye referencias bibliográficas.