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| 001 |
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|a Containing papers presented at the Fourth International Workshop on Expert Evaluation and Control of Semiconductor Materials and Technologies :
|b June 22-24, 1998, Cardiff, Wales /
|c Guest Editors, A.A. Rezazadeh, J.G. Swanson.
|
| 260 |
# |
# |
|a Amsterdam ;
|a Lausanne ;
|a New York, NY :
|b Elsevier,
|c 1999.
|
| 300 |
# |
# |
|a vi, 220 p. :
|b il. ;
|c 28 cm.
|
| 111 |
2 |
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|a International Workshop on Expert Evaluation and Control of Semiconductor Materials and Technologies
|n (4th :
|d 1998 :
|c Cardiff, Wales)
|
| 700 |
1 |
# |
|a Rezazadeh, A. A.
|
| 700 |
1 |
# |
|a Swanson, J. G.
|
| 246 |
3 |
0 |
|a Fourth International Workshop on Expert Evaluation and Control of Semiconductor Materials and Technologies
|
| 490 |
1 |
# |
|a Materials science & engineering. B, Solid-state materials for advanced technology,
|v v. B66, nos. 1-3
|x 0921-5107 ;
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 040 |
# |
# |
|a FAS
|b spa
|c FAS
|d OCL
|d arbccab
|
| 500 |
# |
# |
|a Incluye índice.
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008398_nuevo-0
|o MATER. SCI. ENG. 1999
|p 008398_nuevo-0
|t 1
|y BK
|
