New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /

New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /

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Detalles Bibliográficos
Autor principal: Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation (1995 : Strasbourg, France)
Autor Corporativo: Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation
Otros Autores: Hemment, P. L. F., Thomas, J.-P., Symposium C on Pushing the Limits of Ion Beam Processing-from Engineering to Atomic Scale Issues
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1996.
Colección:Nuclear instruments & methods in physics research. Section B v. 112
Materias:
Ions > Congresses.
Ion bombardment > Congresses.
Descripción
Notas:Incluye índice.
Descripción Física:xv, 355 p. : il. ; 27 cm.
ISSN:0168-583X ;

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