Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /

Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /

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Detalles Bibliográficos
Autor principal: Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
Autor Corporativo: Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control
Otros Autores: Crean, G. M., ed., Stuck, R., ed., Woollam, J. A., ed., European Materials Reseach Society. Spring Meeting (1992 : Strasbourg, France)
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam, Netherlands : North-Holland, 1993.
Colección:Applied Surface Science 1993, v. 63, no. 1-4
Materias:
Semiconductor materials
Technology > Congresses.
Materials testing
Ensayo de materiales
Congresos.
Materiales semiconductores
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245 1 0 |a Semiconductors materials analysis and fabrication process control :  |b Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /  |c edited by G. M. Crean, R. Stuck and J. A. Woollam. 
260 # # |a Amsterdam, Netherlands :  |b North-Holland,  |c 1993. 
300 # # |a xiv, 338 p. :  |b il. ;  |c 26 cm. 
504 # # |a Incluye referencias bibliográficas e índice. 
111 2 # |a Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control  |d (1992 :  |c Strasbourg, France) 
710 2 # |a European Materials Reseach Society.  |b Spring Meeting (1992 : Strasbourg, France) 
740 0 # |a Diaganostic techniques for semiconductor materials analysis. 
080 # # |a 621.382:061.3 
650 # 7 |a Semiconductor materials  |2 inist 
650 # 0 |a Technology  |v Congresses. 
650 # 7 |a Materials testing  |2 inist 
650 # 7 |a Ensayo de materiales  |2 inist 
650 # 7 |a Congresos.  |2 inist 
650 # 7 |a Materiales semiconductores  |2 inist 
700 1 # |a Crean, G. M.,  |e ed.  |4 edt 
700 1 # |a Stuck, R.,  |e ed.  |4 edt 
700 1 # |a Woollam, J. A.,  |e ed.  |4 edt 
490 1 # |a Applied Surface Science 1993,  |v v. 63, no. 1-4  |x 0169-4332 ; 
040 # # |a arbccab  |b spa 
500 # # |a En cubierta: Complete Volume. 
500 # # |a "This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."--pref. 
942 # # |c BK 
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