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070207s1993####ne#a###f#b####101#0#eng#d |
| 005 |
20070207080458.0 |
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|a Semiconductors materials analysis and fabrication process control :
|b Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /
|c edited by G. M. Crean, R. Stuck and J. A. Woollam.
|
| 260 |
# |
# |
|a Amsterdam, Netherlands :
|b North-Holland,
|c 1993.
|
| 300 |
# |
# |
|a xiv, 338 p. :
|b il. ;
|c 26 cm.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 111 |
2 |
# |
|a Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control
|d (1992 :
|c Strasbourg, France)
|
| 710 |
2 |
# |
|a European Materials Reseach Society.
|b Spring Meeting (1992 : Strasbourg, France)
|
| 740 |
0 |
# |
|a Diaganostic techniques for semiconductor materials analysis.
|
| 080 |
# |
# |
|a 621.382:061.3
|
| 650 |
# |
7 |
|a Semiconductor materials
|2 inist
|
| 650 |
# |
0 |
|a Technology
|v Congresses.
|
| 650 |
# |
7 |
|a Materials testing
|2 inist
|
| 650 |
# |
7 |
|a Ensayo de materiales
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 650 |
# |
7 |
|a Materiales semiconductores
|2 inist
|
| 700 |
1 |
# |
|a Crean, G. M.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Stuck, R.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Woollam, J. A.,
|e ed.
|4 edt
|
| 490 |
1 |
# |
|a Applied Surface Science 1993,
|v v. 63, no. 1-4
|x 0169-4332 ;
|
| 040 |
# |
# |
|a arbccab
|b spa
|
| 500 |
# |
# |
|a En cubierta: Complete Volume.
|
| 500 |
# |
# |
|a "This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."--pref.
|
| 942 |
# |
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|c BK
|
| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 013385_nuevo-0
|o APPL. SURF. SCI. 1993
|p 013385_nuevo-0
|t 1
|y BK
|
