Mechanical properties of MEMS structures.

Mechanical properties of MEMS structures.

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Detalles Bibliográficos
Formato:	Sin ejemplares
Lenguaje:
Publicado:	Norwell, MA : Kluwer, 2003.
Colección:	Journal of materials science, v. 38, no. 20 (2003)
Materias:	Materials

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