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|a Papers presented at the materials research society meeting :
|b Symposium K : Multilevel metal process integration, San Francisco CA. USA, April 1-2, 1997 /
|c Guest editors, G. Dixit, R. Fiordalice and R. Mosely.
|
| 260 |
# |
# |
|a Amsterdam :
|b Elsevier,
|c 1998.
|
| 300 |
# |
# |
|a xiii, 884 p.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índices.
|
| 111 |
2 |
# |
|a Materials research society meeting
|p Symposium K : Multilevel metal process integration
|d (1997 :
|c San Francisco CA. USA)
|
| 080 |
# |
# |
|a 669:061.3
|
| 650 |
# |
7 |
|a Metals
|2 inist
|
| 650 |
# |
7 |
|a Metales
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 650 |
# |
7 |
|a Congresses.
|2 inist
|
| 700 |
1 |
# |
|a Dixit, G.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Fiordalice, R.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Mosely, R.,
|e ed.
|4 edt
|
| 490 |
1 |
# |
|a Thin Solid Films,
|v v. 320, no. 1
|x 0040-6090 ;
|
| 040 |
# |
# |
|a arbccab
|b spa
|
| 942 |
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|c BK
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| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 013840_nuevo-0
|o THIN SOLID FILMS 1998
|p 013840_nuevo-0
|t 1
|y BK
|
