Fundamentals of nanoscale film analysis /
From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to me...
Guardado en:
Autor principal: | Alford, Terry L. |
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Otros Autores: | Feldman, Leonard C., Mayer, James W., 1930- |
Formato: | Libro |
Lenguaje: | |
Publicado: |
New York, N.Y. ; London :
Springer,
c2007.
|
Materias: | |
Acceso en línea: | Tapa Indice |
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