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|a 0894-6507
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|2 1
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| 032 |
# |
# |
|a 001891
|b USPS
|
| 037 |
# |
# |
|b IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331
|
| 040 |
# |
# |
|a NSDP
|c NSDP
|d N
|d NSDP
|d OCoLC
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|d NIC
|d DLC
|d NSDP
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|d DLC
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| 050 |
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|a TK7836
|b .I39
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| 050 |
1 |
4 |
|a HD9696.S4
|b I35
|
| 210 |
0 |
# |
|a IEEE trans. semicond. manuf.
|
| 222 |
# |
0 |
|a IEEE transactions on semiconductor manufacturing
|
| 245 |
0 |
0 |
|a IEEE transactions on semiconductor manufacturing :
|b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
|
| 246 |
3 |
# |
|a Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing
|
| 246 |
3 |
0 |
|a Transactions on semiconductor manufacturing
|
| 246 |
3 |
0 |
|a Semiconductor manufacturing
|
| 260 |
# |
# |
|a New York, N.Y. :
|b Institute of Electrical and Electronics Engineers,
|c c1988-
|
| 300 |
# |
# |
|a v. :
|b il. ;
|c 28 cm.
|
| 310 |
# |
# |
|a Quarterly
|
| 362 |
0 |
# |
|a Vol. 1, no. 1 (Feb. 1988)-
|
| 500 |
# |
# |
|a Title from cover.
|
| 530 |
# |
# |
|a Available in microfiche and microfilm.
|
| 530 |
# |
# |
|a Also issued online.
|
| 650 |
# |
0 |
|a Semiconductors
|x Design and construction
|v Periodicals.
|
| 650 |
# |
6 |
|a Semiconducteurs
|v Périodiques.
|
| 650 |
# |
6 |
|a Circuits intégrés à très grande échelle
|v Périodiques.
|
| 710 |
2 |
# |
|a IEEE Components, Hybrids, and Manufacturing Technology Society.
|
| 710 |
2 |
# |
|a IEEE Electron Devices Society.
|
| 710 |
2 |
# |
|a IEEE Reliability Society.
|
| 710 |
2 |
# |
|a IEEE Solid-State Circuits Council.
|
| 710 |
2 |
# |
|a Institute of Electrical and Electronics Engineers.
|
| 776 |
1 |
# |
|t IEEE transactions on semiconductor manufacturing (Online)
|x 1558-2345
|w (DLC) 2005212499
|w (OCoLC)60638452
|
| 852 |
# |
# |
|x universal pattern
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| 853 |
# |
# |
|8 1
|a v.
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|u 4
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|x 02
|
| 863 |
# |
# |
|8 1
|a <1>-
|i <1988>-
|x provisional
|
| 866 |
# |
0 |
|a 1990, 3 (2-4); 1991-1992, 4-5; 1993, 6 (1).
|
| 082 |
0 |
0 |
|a 621.3815/2
|2 19
|
| 942 |
# |
# |
|c CR
|
