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| 008 |
720308s1971####gw#a#####b####100#0#eng## |
| 005 |
20060516083401.0 |
| 001 |
BCCAB006923 |
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AR-BCCAB |
| 245 |
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|a Ion implantation in semiconductors ;
|b proceedings /
|c Edited by I. Ruge and J. Graul.
|
| 260 |
# |
# |
|a Berlin ;
|a New York :
|b Springer-Verlag,
|c 1971.
|
| 300 |
# |
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|a 506 p. :
|b il. ;
|c 26 cm.
|
| 504 |
# |
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|a Incluye referencias bibliográficas.
|
| 020 |
# |
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|a 3540056661
|
| 111 |
2 |
# |
|a International Conference on Ion Implantation in Semiconductors
|n (2nd :
|d 1971 :
|c Garmisch-Partenkirchen, Germany)
|
| 700 |
1 |
# |
|a Ruge, I.,
|e ed.
|
| 700 |
1 |
# |
|a Graul, J.,
|e ed.
|
| 650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
| 650 |
# |
0 |
|a Semiconductors
|v Congresses.
|
| 010 |
# |
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|a ###75183177#
|
| 029 |
# |
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|a NLGGC
|b 784630798
|
| 050 |
0 |
0 |
|a TK7871.85
|b .I576 1971
|
| 049 |
# |
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|a AR5A
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| 040 |
# |
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|a DLC
|c DLC
|d OCL
|d OCLCQ
|b spa
|d arbccab
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| 500 |
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|a 2 ejs.
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| 082 |
0 |
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|a 621.3815/2
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| 942 |
# |
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|c BK
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| 952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 7120
|o 621.382:061.3 I8 1971
|p 7120
|t 1
|y BK
|
| 952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 7121
|o 621.382:061.3 I8 1971 Ej.2
|p 7121
|t 2
|y BK
|
