Digest of papers : MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan /

Digest of papers : MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan /

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Detalles Bibliográficos
Autor principal: International MicroProcesses and Nanotechnology Conference (10th : 1997 : Nagoya, Japan)
Autor Corporativo: International MicroProcesses and Nanotechnology Conference
Otros Autores: IEEE Electron Devices Society., åOyåo Butsuri Gakkai., Business Center for Academic Societies Japan.
Formato: Sin ejemplares
Lenguaje:
Publicado: Tokyo, Japan : Business Center for Academic Societies Japan, c1997.
Colección:Japanese Journal of Applied Physics ; v. 36, no. 12B (1997)
Materias:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Lithography > Congresses.
Nanotechnology > Congresses.
Microelectronics > Congresses.
Descripción
Descripción Física:xx, 238 p. : il. ; 28 cm.

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