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| LEADER |
01348cam#a2200265ua#4500 |
| 008 |
010109s1997####ja#a##########100#0#eng#d |
| 005 |
20060807090534.0 |
| 001 |
BCCAB007502 |
| 003 |
AR-BCCAB |
| 245 |
1 |
0 |
|a Digest of papers :
|b MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan /
|c sponsored by the Japan Society of Applied Physics in cooperation with IEEE Electron Devices Society ... [et al.].
|
| 260 |
# |
# |
|a Tokyo, Japan :
|b Business Center for Academic Societies Japan,
|c c1997.
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| 300 |
# |
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|a xx, 238 p. :
|b il. ;
|c 28 cm.
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| 111 |
2 |
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|a International MicroProcesses and Nanotechnology Conference
|n (10th :
|d 1997 :
|c Nagoya, Japan)
|
| 710 |
2 |
# |
|a IEEE Electron Devices Society.
|
| 710 |
2 |
# |
|a åOyåo Butsuri Gakkai.
|
| 710 |
2 |
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|a Business Center for Academic Societies Japan.
|
| 080 |
# |
# |
|a 621.38:061.3
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| 650 |
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0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction
|v Congresses.
|
| 650 |
# |
0 |
|a Lithography
|v Congresses.
|
| 650 |
# |
0 |
|a Nanotechnology
|v Congresses.
|
| 650 |
# |
0 |
|a Microelectronics
|v Congresses.
|
| 490 |
1 |
# |
|a Japanese Journal of Applied Physics ;
|v v. 36, no. 12B (1997)
|
| 040 |
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|a CAI
|c CAI
|d OCLCQ
|b spa
|d arbccab
|
| 942 |
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|c BK
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| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 007502_nuevo-0
|o JPN. J. APPL. PHYS. 1997
|p 007502_nuevo-0
|t 1
|y BK
|
