Proceedings of the 4th International Conference on Materials for Microelectronics and NanoEngineering : Espoo, Finland, 10-12 June 2002 /

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Detalles Bibliográficos
Autor principal: International Conference on Materials for Microelectronics and NanoEngineering (4th : 2002 June 10-12 : Espoo, Finland)
Autor Corporativo: International Conference on Materials for Microelectronics and NanoEngineering
Otros Autores: Willoughby, Arthur.
Formato: Sin ejemplares
Lenguaje:
Publicado: Norwell, MA : Kluwer Acedemic Publishers, c2003.
Colección:Journal of materials science. Materials in electronics. ; V. 14, no. 5-7.
Materias:
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245 1 0 |a Proceedings of the 4th International Conference on Materials for Microelectronics and NanoEngineering :  |b Espoo, Finland, 10-12 June 2002 /  |c [editor] A. Willoughby. 
260 # # |a Norwell, MA :  |b Kluwer Acedemic Publishers,  |c c2003. 
300 # # |a v, p, 257-462 :  |b il. ;  |c 30 cm. 
504 # # |a Incluye referencias bibliográficas. 
111 2 # |a International Conference on Materials for Microelectronics and NanoEngineering  |n (4th :  |d 2002 June 10-12 :  |c Espoo, Finland) 
700 1 # |a Willoughby, Arthur. 
246 3 0 |a Materials for microelectronics and nanoengineering 
246 1 4 |a Proceedings of the ICMFMN--Espoo 2002 
246 3 0 |a ICMFMN--Espoo 2002 
650 # 0 |a Microelectronics  |x Materials  |v Congresses. 
650 # 0 |a Nanotechnology  |v Congresses. 
490 1 # |a Journal of materials science. Materials in electronics. ;  |v V. 14, no. 5-7. 
040 # # |a HNK  |c HNK  |b spa  |d arbccab 
500 # # |a Issued as: Journal of materials science. Materials in electronics, v. 14, no. 5-7 (May-July 2003). 
500 # # |a Title from contents page. 
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