Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico /

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Detalles Bibliográficos
Autor principal: Conference on the Physics and Chemistry of Semiconductor Interfaces (10th : 1983 : Santa Fe, NM)
Autor Corporativo: Conference on the Physics and Chemistry of Semiconductor Interfaces
Otros Autores: Bauer, Robert S., American Physical Society., American Vacuum Society.
Formato: Sin ejemplares
Lenguaje:
Publicado: New York : American Institute of Physics, 1983.
Colección:Journal of vacuum science & technology. B, Microelectronics processing and phenomena, v. 1, no. 3
Materias:
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245 1 0 |a Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico /  |c sponsored by the American Physical Society ... [et al.] ; special editor for the proceedings: Robert S. Bauer. 
260 # # |a New York :  |b American Institute of Physics,  |c 1983. 
300 # # |a p. 519-859 :  |b il. ;  |c 30 cm. 
111 2 # |a Conference on the Physics and Chemistry of Semiconductor Interfaces  |n (10th :  |d 1983 :  |c Santa Fe, NM) 
700 1 # |a Bauer, Robert S. 
710 2 # |a American Physical Society. 
710 2 # |a American Vacuum Society. 
650 # 0 |a Semiconductors  |v Congresses. 
650 # 0 |a Surfaces (Physics)  |v Congresses. 
650 # 0 |a Surface chemistry  |v Congresses. 
049 # # |a AR5A 
490 1 # |a Journal of vacuum science & technology. B, Microelectronics processing and phenomena,  |v v. 1, no. 3  |x 0734-211X ; 
504 # # |a Incluye referencias bibliográficas. 
040 # # |a MNU  |c MNU  |d OCL  |b spa  |d arbccab 
500 # # |a Incluye índice. 
942 # # |c BK 
952 # # |2 udc  |7 NOT_LOAN  |a ARBCCAB  |b ARBCCAB  |i 008299_nuevo-0  |o J. VAC. SCI. TECHNOL. 1983  |p 008299_nuevo-0  |t 1  |y BK