Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 /

Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 /

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Detalles Bibliográficos
Autor principal: International Conference on Ion Implantation: Equipment and Techniques (5th : 1984 : Jeffersonville, Vt.)
Autor Corporativo: International Conference on Ion Implantation: Equipment and Techniques
Otros Autores: Ziegler, J. F., Brown, R. L.
Formato: Sin ejemplares
Lenguaje:Inglés
Publicado: Amsterdam : North-Holland, 1985.
Colección:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. B6, nos. 1, 2
Materias:
Ion implantation > Congresses.
Semiconductor doping > Congresses.
Descripción
Descripción Física:xiv, 451 p. : il. ; 27 cm.
Bibliografía:Incluye referencias bibliográficas.
ISSN:0168-583X ;

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