Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 /

Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 /

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Detalles Bibliográficos
Autor principal:	International Conference on Ion Implantation: Equipment and Techniques (5th : 1984 : Jeffersonville, Vt.)
Autor Corporativo:	International Conference on Ion Implantation: Equipment and Techniques
Otros Autores:	Ziegler, J. F., Brown, R. L.
Formato:	Sin ejemplares
Lenguaje:
Publicado:	Amsterdam : North-Holland, 1985.
Colección:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. B6, nos. 1, 2
Materias:	Ion implantation > Congresses. Semiconductor doping > Congresses.

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