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930217s1993####ne#a##########100#0#eng## |
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|a Ion implantation technology-92 :
|b proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992 /
|c editors, D.F. Downey ... [et al.].
|
260 |
# |
# |
|a Amsterdam ;
|a New York :
|b North-Holland,
|c 1993.
|
300 |
# |
# |
|a xvii, 697 p. :
|b il. ;
|c 27 cm.
|
020 |
# |
# |
|a 0444899944 (acid-free paper)
|
111 |
2 |
# |
|a International Conference on Ion Implantation Technology
|n (9th :
|d 1992 :
|c Gainesville, Fla.)
|
700 |
1 |
# |
|a Downey, D. F.
|
080 |
# |
# |
|a 621.382:061.3
|
650 |
# |
0 |
|a Semiconductors
|v Congresses.
|
650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
650 |
# |
0 |
|a Semiconductor doping
|v Congresses.
|
653 |
0 |
# |
|a Ions
|a Implants
|
490 |
1 |
# |
|a Nuclear instruments and Methods in Physics Research. B ;
|v v. 74, nos. 1-2 (1993)
|
504 |
# |
# |
|a Incluye referencias bibliográficas.
|
040 |
# |
# |
|a DLC
|c DLC
|d UKM
|d OCL
|d BAKER
|d NLGGC
|b spa
|d arbccab
|
500 |
# |
# |
|a Incluye índice.
|
942 |
# |
# |
|c BK
|
952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 009040_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1992
|p 009040_nuevo-0
|t 1
|y BK
|