Photon-assisted processing of surfaces and thin films : proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994 /

Photon-assisted processing of surfaces and thin films : proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994 /

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Detalles Bibliográficos
Autor principal: Symposium B on Photon-Assisted Processing of Surfaces and Thin Films (1994 : Strasbourg, France)
Autor Corporativo: Symposium B on Photon-Assisted Processing of Surfaces and Thin Films
Otros Autores: Dieleman, J., Biermann, U. K. P., Hess, P., European Materials Research Society. Meeting
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1995.
Materias:
Surfaces (Technology) > Congresses.
Lasers > Industrial applications > Congresses.
Photon beams > Industrial applications > Congresses.
Plasma etching > Congresses.
Plasma-enhanced chemical vapor deposition > Congresses.
Descripción
Descripción Física:632 p. : il., figuras, tablas ; 26 cm.
Bibliografía:Incluye referencias bibliográficas e índices.

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