Photon-assisted processing of surfaces and thin films : proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994 /

Guardado en:
Detalles Bibliográficos
Autor principal: Symposium B on Photon-Assisted Processing of Surfaces and Thin Films (1994 : Strasbourg, France)
Autor Corporativo: Symposium B on Photon-Assisted Processing of Surfaces and Thin Films
Otros Autores: Dieleman, J., Biermann, U. K. P., Hess, P., European Materials Research Society. Meeting
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1995.
Materias:
LEADER 01596cam#a2200325ua#4500
008 990523s1995####ne#a#####b####101#0#eng#d
005 20060712133743.0
001 BCCAB007521
003 AR-BCCAB
245 1 0 |a Photon-assisted processing of surfaces and thin films :  |b proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994 /  |c edited by J. Dieleman, U.K.P. Biermann, and P. Hess. 
260 # # |a Amsterdam :  |b North-Holland,  |c 1995. 
300 # # |a 632 p. :  |b il., figuras, tablas ;  |c 26 cm. 
504 # # |a Incluye referencias bibliográficas e índices. 
111 2 # |a Symposium B on Photon-Assisted Processing of Surfaces and Thin Films  |d (1994 :  |c Strasbourg, France) 
700 1 # |a Dieleman, J. 
700 1 # |a Biermann, U. K. P.  |q (Udo K. P.) 
700 1 # |a Hess, P.  |q (Peter) 
710 2 # |a European Materials Research Society.  |b Meeting  |d (1994 :  |c Strasbourg, France) 
246 3 0 |a Proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference 
080 # # |a 538.971:06.3 
080 # # |a 539.23:061.3 
650 # 0 |a Surfaces (Technology)  |v Congresses. 
650 # 0 |a Lasers  |x Industrial applications  |v Congresses. 
650 # 0 |a Photon beams  |x Industrial applications  |v Congresses. 
650 # 0 |a Plasma etching  |v Congresses. 
650 # 0 |a Plasma-enhanced chemical vapor deposition  |v Congresses. 
049 # # |a AR5A 
040 # # |a arbccab  |b spa 
942 # # |c BK 
952 # # |2 udc  |7 NOT_LOAN  |a ARBCCAB  |b ARBCCAB  |i 007521_nuevo-0  |o APPL. SURF. SCI. 1995  |p 007521_nuevo-0  |t 1  |y BK