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|a Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) :
|b Kanazawa, Japan, 4-6 June 1997 /
|c organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes ; sponsored by the Study Committee of Sputtering of Sputtering & Plasma Processes, Japan Technology Transfer Association ; advisory board, Akira Kinbara ... [et al.] ; executive committee, Minoru Inoue [et al.].
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|a p. 475-795 :
|b il. ;
|c 28 cm.
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|a International Symposium on Sputtering and Plasma Processes
|n (4th :
|d 1997 :
|c Kanazawa-shi, Japan)
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|a Special issue of the sputtering and plasma processes
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| 049 |
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|a AR5A
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|a Vacuum,
|v v. 51, no. 4
|x 0042-207X ;
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| 040 |
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|a IWA
|c IWA
|b spa
|d arbccab
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|c BK
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 007898_nuevo-0
|o VACUUM 1998
|p 007898_nuevo-0
|t 1
|y BK
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