Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /
Guardado en:
Autor principal: | International Symposium on Sputtering and Plasma Processes (4th : 1997 : Kanazawa-shi, Japan) |
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Autor Corporativo: | International Symposium on Sputtering and Plasma Processes |
Formato: | Sin ejemplares |
Lenguaje: | |
Colección: | Vacuum,
v. 51, no. 4 |
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