Detalles Bibliográficos
| Autor principal: |
Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics (1998 : Strasbourg, France) |
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| Autor Corporativo: |
Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics |
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| Otros Autores: |
Lindner, Jorg K. N.,
Council of Europe.,
European Commission.,
European Materials Research Society.,
E-MRS Spring Meeting |
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| Formato: | Sin ejemplares
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| Lenguaje: | |
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| Publicado: |
Amsterdam :
North-Holland,
1999.
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| Colección: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
v. 147, no. 1/4
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