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|a Ion implantation into semiconductors, oxides and ceramics :
|b proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998 /
|c editors, Jorg K.N. Lindner ... [et al.].
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|a Amsterdam :
|b North-Holland,
|c 1999.
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|a xiv, 442 p. :
|b il.
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|a Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics
|d (1998 :
|c Strasbourg, France)
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|a Lindner, Jorg K. N.
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|a Council of Europe.
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|a European Commission.
|
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|a European Materials Research Society.
|
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|a E-MRS Spring Meeting
|d (1998 :
|c Strasbourg France)
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|a 621.382:061.3
|
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|a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
|v v. 147, no. 1/4
|x 0168-583X ;
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|a CAI
|c CAI
|d OCLCQ
|b spa
|d arbccab
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|a Held under the auspices of the Council of Europe, the Commission of European Communities.
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|c BK
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008780_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1999
|p 008780_nuevo-0
|t 1
|y BK
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