Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998 /

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Detalles Bibliográficos
Autor principal: Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics (1998 : Strasbourg, France)
Autor Corporativo: Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics
Otros Autores: Lindner, Jorg K. N., Council of Europe., European Commission., European Materials Research Society., E-MRS Spring Meeting
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1999.
Colección:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. 147, no. 1/4
LEADER 01342cam#a2200253ua#4500
008 990119s1999####ne#a##########100#0#eng#d
005 20060731093712.0
001 BCCAB008780
003 AR-BCCAB
245 1 0 |a Ion implantation into semiconductors, oxides and ceramics :  |b proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998 /  |c editors, Jorg K.N. Lindner ... [et al.]. 
260 # # |a Amsterdam :  |b North-Holland,  |c 1999. 
300 # # |a xiv, 442 p. :  |b il. 
111 2 # |a Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics  |d (1998 :  |c Strasbourg, France) 
700 1 # |a Lindner, Jorg K. N. 
710 2 # |a Council of Europe. 
710 2 # |a European Commission. 
710 2 # |a European Materials Research Society. 
711 2 # |a E-MRS Spring Meeting  |d (1998 :  |c Strasbourg France) 
080 # # |a 621.382:061.3 
490 1 # |a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,  |v v. 147, no. 1/4  |x 0168-583X ; 
040 # # |a CAI  |c CAI  |d OCLCQ  |b spa  |d arbccab 
500 # # |a Held under the auspices of the Council of Europe, the Commission of European Communities. 
942 # # |c BK 
952 # # |2 udc  |7 NOT_LOAN  |a ARBCCAB  |b ARBCCAB  |i 008780_nuevo-0  |o NUCL. INSTRUM. METH. PHYS. RES. B 1999  |p 008780_nuevo-0  |t 1  |y BK