Ion implantation technology : proceedings of the Sixth International Conference on Ion Implantation Technology, University of California, Berkeley, CA, USA, July 28-August 1, 1986 /
Guardado en:
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| Formato: | Sin ejemplares |
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| Publicado: |
Amsterdam :
North-Holland,
1987.
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| Colección: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
v. B21, nos. 2-4 (Mar. 1987) |
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