Handbook of sputter deposition technology : principles, technology, and applications /

Handbook of sputter deposition technology : principles, technology, and applications /

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Detalles Bibliográficos
Autor principal:	Wasa, Kiyotaka.
Otros Autores:	Hayakawa, Shigeru, 1925-
Formato:	Libro
Lenguaje:
Publicado:	Park Ridge, N.J., U.S.A. : Noyes Publications, c1992.
Colección:	Materials science and process technology series
Materias:	Cathode sputtering (Plating process). Thin films.
Acceso en línea:	Reseña

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