Fundamentals of microfabrication : the science of miniaturization /

Fundamentals of microfabrication : the science of miniaturization /

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Detalles Bibliográficos
Autor principal:	Madou, Marc J.
Formato:	Libro
Lenguaje:
Publicado:	Boca Raton : CRC Press, c2002.
Edición:	2nd ed.
Materias:	Microelectronics. Integrated circuits > Design and construction. Microelectromechanical systems > Design and construction. Machining. Microelectronic packaging. Lasers > Industrial applications.
Acceso en línea:	Reseña

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