The Journal of vacuum science and technology.

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Detalles Bibliográficos
Otros Autores:	American Institute of Physics., American Vacuum Society.
Formato:	Sin ejemplares
Lenguaje:	Inglés
Publicado:	[New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
Materias:	Vacuum technology > Periodicals. Vacuümtechniek. Température > Périodiques. Physique > Périodiques.

Descripción
Notas:	Title varies slightly. Title from cover.
Descripción Física:	21 v. : il. ; 28 cm. Also issued on microfilm.
Frecuencia de Publicación:	8 no. a year, 1982
ISSN:	0022-5355 0734-2101 0734-211X
Publicación relacionada:	Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.

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