Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

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Detalles Bibliográficos
Otros Autores:	American Vacuum Society., American Institute of Physics.
Formato:	Sin ejemplares
Lenguaje:	Inglés
Publicado:	New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.
Materias:	Vacuum technology > Periodicals. Vide (Technologie) > Périodiques. Microélectronique > Périodiques. Matériaux nanocristallins > Périodiques. Vacuümtechniek. Micro-elektronica.

Descripción
Notas:	Title from cover.
Descripción Física:	8 v. : il. ; 29 cm. Also issued on microfilm.
Frecuencia de Publicación:	Bimonthly, <Jan./Feb. 1985- >
ISSN:	0734-211X 0022-5355 1071-1023
Publicación relacionada:	Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.

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