|
|
|
|
| LEADER |
02253cas#a2200493#a#4500 |
| 001 |
RCBCCAB019712 |
| 005 |
20101130154758.0 |
| 007 |
t| |
| 008 |
751101d19641982nyubx#p#######0###a0eng#c |
| 003 |
AR-BCCAB |
| 010 |
# |
# |
|a ###68053979#
|z sn#83011019#
|
| 016 |
7 |
# |
|a 9890565
|2 DNLM
|
| 016 |
7 |
# |
|a SR0088358
|2 DNLM
|
| 022 |
# |
# |
|a 0022-5355
|l 0022-5355
|2 1
|
| 030 |
# |
# |
|a JVSTAL
|
| 040 |
# |
# |
|a MnMULS
|c MnMULS
|d NSDP
|d InU
|d NSDP
|d WaU
|d DLC
|d NST
|d DLC
|d NST
|d AIP
|d NSDP
|d AIP
|d NST
|d AIP
|d DLC
|d MH
|d DLC
|d NST
|d MH
|d MCM
|d DNLM
|d OCoLC
|d TxCM
|d NLGGC
|d CaQQL
|d CU-S
|d OCoLC
|
| 050 |
0 |
0 |
|a TJ940
|b .J67
|
| 210 |
0 |
# |
|a J. vac. sci. technol.
|
| 222 |
# |
0 |
|a Journal of vacuum science & technology
|
| 245 |
0 |
4 |
|a The Journal of vacuum science and technology.
|
| 260 |
# |
# |
|a [New York, N.Y.] :
|b Published for the American Vacuum Society by the American Institute of Physics,
|c [1964-1982]
|
| 300 |
# |
# |
|a 21 v. :
|b il. ;
|c 28 cm.
|
| 310 |
# |
# |
|a 8 no. a year,
|b 1982
|
| 321 |
# |
# |
|a Bimonthly,
|b 1964-1980
|
| 321 |
# |
# |
|a 7 no. a year,
|b 1981
|
| 362 |
0 |
# |
|a Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982).
|
| 500 |
# |
# |
|a Title varies slightly.
|
| 500 |
# |
# |
|a Title from cover.
|
| 510 |
0 |
# |
|a Chemical abstracts
|x 0009-2258
|
| 530 |
# |
# |
|a Also issued on microfilm.
|
| 550 |
# |
# |
|a Official publication of the American Vacuum Society.
|
| 580 |
# |
# |
|a Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
|
| 650 |
# |
0 |
|a Vacuum technology
|v Periodicals.
|
| 650 |
1 |
7 |
|a Vacuümtechniek.
|2 gtt
|
| 650 |
# |
6 |
|a Température
|v Périodiques.
|
| 650 |
# |
6 |
|a Physique
|v Périodiques.
|
| 710 |
2 |
# |
|a American Institute of Physics.
|
| 710 |
2 |
# |
|a American Vacuum Society.
|
| 776 |
0 |
8 |
|i Online version:
|t Journal of vacuum science and technology (Online)
|w (DLC) 2003263060
|w (OCoLC)46870934
|
| 785 |
1 |
6 |
|t Journal of vacuum science & technology. A, Vacuum, surfaces, and films
|x 0734-2101
|w (DLC) 83643441
|w (OCoLC)8697396
|w (arbccab)016872
|
| 785 |
1 |
6 |
|t Journal of vacuum science & technology. B, Microelectronics processing and phenomena
|x 0734-211X
|w (DLC) 83642371
|w (OCoLC)8697479
|w (arbccab)016873
|
| 866 |
# |
0 |
|a 1964, 1 (1,2); 1965-1982, 2-21.
|
| 082 |
# |
4 |
|a 621.55/05
|
| 942 |
# |
# |
|c CR
|
