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| LEADER |
02882cas#a2200553#a#4500 |
| 001 |
RCBCCAB019713 |
| 005 |
20101130155439.0 |
| 007 |
cr#cn| |
| 008 |
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| 003 |
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| 010 |
# |
# |
|a ###83643441#
|z sn#82003445#
|
| 016 |
7 |
# |
|a 9890566
|2 DNLM
|
| 016 |
7 |
# |
|a SR0088359
|2 DNLM
|
| 022 |
0 |
# |
|a 0734-2101
|l 0734-2101
|2 1
|
| 030 |
# |
# |
|a JVTAD6
|
| 032 |
# |
# |
|a 716990
|b USPS
|
| 040 |
# |
# |
|a NSDP
|c NSDP
|d MH
|d NST
|d DLC
|d NST
|d OCoLC
|d NST
|d DLC
|d AIP
|d NST
|d AIP
|d NSDP
|d NST
|d NSDP
|d AIP
|d DLC
|d NST
|d NSDP
|d DLC
|d WaU
|d CU-S
|d MCM
|d NSDP
|d MCM
|d MH
|d WaU
|d DNLM
|d OCoLC
|d CaQMU
|d WaU
|d DLC
|d NSDP
|d CU-S
|d CLU
|d NLGGC
|d InU
|d CU-S
|d OCoLC
|
| 050 |
0 |
0 |
|a TJ940
|b .J668
|
| 210 |
0 |
# |
|a J. vac. sci. technol., A, Vac. surf. films
|
| 222 |
# |
0 |
|a Journal of vacuum science & technology. A. Vacuum, surfaces, and films
|
| 245 |
0 |
0 |
|a Journal of vacuum science & technology.
|n A,
|p Vacuum, surfaces, and films :
|b an official journal of the American Vacuum Society.
|
| 246 |
1 |
# |
|i Issues for <July/Aug. 2002>-Nov./Dec. 2002 also called:
|a JVST A
|
| 246 |
3 |
# |
|a Journal of vacuum science and technology.
|n A,
|p Vacuum, surfaces, and films
|
| 246 |
3 |
0 |
|a Vacuum, surfaces, and films
|
| 260 |
# |
# |
|a New York :
|b Published for the Society by the American Institute of Physics,
|c 1983-2002.
|
| 300 |
# |
# |
|a v. :
|b il. ;
|c 29 cm.
|
| 310 |
# |
# |
|a Bimonthly
|b <Jan./Feb. 1985>-Nov./Dec. 2002.
|
| 321 |
# |
# |
|a Quarterly,
|b Jan./Mar. 1983-
|
| 362 |
0 |
# |
|a 2nd ser., v. 1, no. 1 (Jan./Mar. 1983)-v. 20, no. 6 (Nov./Dec. 2002).
|
| 500 |
# |
# |
|a Title from cover.
|
| 580 |
# |
# |
|a Each year the Mar./Apr. issue is republished and issued separately in a special hardbound edition which contains the proceedings of the U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride (after 1988 the name of the conference varies).
|
| 650 |
# |
0 |
|a Vacuum technology
|v Periodicals.
|
| 650 |
# |
6 |
|a Vide (Technologie)
|v Périodiques.
|
| 650 |
# |
6 |
|a Chimie des surfaces
|v Périodiques.
|
| 650 |
# |
6 |
|a Couches minces
|v Périodiques.
|
| 650 |
# |
6 |
|a Surfaces (Physique)
|v Périodiques.
|
| 650 |
1 |
7 |
|a Vacuümtechniek.
|2 gtt
|
| 710 |
2 |
# |
|a American Vacuum Society.
|
| 710 |
2 |
# |
|a American Institute of Physics.
|
| 776 |
0 |
8 |
|i Online version:
|t Journal of vacuum science & technology. A, Vacuum, surfaces, and films (Online)
|x 1520-8559
|w (DLC)sn 98004661
|w (OCoLC)37329463
|
| 780 |
0 |
1 |
|t Journal of vacuum science and technology
|x 0022-5355
|w (DLC) 68053979
|w (OCoLC)1754855
|w (arbccab)016871
|
| 785 |
0 |
0 |
|t Journal of vacuum science & technology. A, International journal devoted to vacuum, surfaces, and films
|x 1553-1813
|w (DLC) 2004204902
|w (OCoLC)56061703
|
| 852 |
# |
# |
|x universal pattern
|
| 853 |
# |
# |
|8 1
|a v.
|b no.
|u 4
|v r
|i (year)
|j (month)
|w q
|x 01
|
| 853 |
# |
# |
|8 2
|a v.
|b no.
|u 6
|v r
|i (year)
|j (month/month)
|w b
|x 01
|
| 863 |
# |
# |
|8 1
|a <1>-
|i <1983>-
|x provisional
|
| 866 |
# |
0 |
|a 1983-1987, 1-5; 1988, 6 (1).
|
| 082 |
0 |
4 |
|a 621.5/5/05
|2 19
|
| 942 |
# |
# |
|c CR
|
