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|a Handbook of microlithography, micromachining, and microfabrication /
|c P. Rai-Choudhury, editor.
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|a Bellingham, Wash., USA :
|b SPIE Optical Engineering Press,
|c c1997.
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|a 2 v. :
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|c 26 cm.
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|a v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
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|a Incluye referencias bibliográficas e índice.
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