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|a High energy ion implantation :
|b proceedings of Symposium C--High Energy Ion Implantation of the E-MRS 1991 Spring Meeting, Strasbourg, France, May 28-30, 1991 /
|c editors, S.U. Campisano, J. Gyulai.
|
| 260 |
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|a Amsterdam, Netherlands :
|b North-Holland,
|c 1992.
|
| 300 |
# |
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|a vi, p. 309-430.
|
| 111 |
2 |
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|a Symposium C: High Energy Ion Implantation
|d (1991 :
|c Strasbourg, France)
|
| 700 |
1 |
# |
|a Campisano, S. U.
|
| 700 |
1 |
# |
|a Gyulai, J.
|
| 711 |
2 |
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|a E-MRS Spring Conference
|d (1991 :
|n (Strasbourg, France)
|
| 080 |
# |
# |
|a 621.382:061.3
|
| 490 |
1 |
# |
|a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
|v v. 62, no. 3
|x 0168-583X ;
|
| 040 |
# |
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|a CAI
|c CAI
|b spa
|d arbccab
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| 942 |
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|c BK
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| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 009083_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1992
|p 009083_nuevo-0
|t 1
|y BK
|
