High energy ion implantation : proceedings of Symposium C--High Energy Ion Implantation of the E-MRS 1991 Spring Meeting, Strasbourg, France, May 28-30, 1991 /

High energy ion implantation : proceedings of Symposium C--High Energy Ion Implantation of the E-MRS 1991 Spring Meeting, Strasbourg, France, May 28-30, 1991 /

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Detalles Bibliográficos
Autor principal:	Symposium C: High Energy Ion Implantation (1991 : Strasbourg, France)
Autor Corporativo:	Symposium C: High Energy Ion Implantation
Otros Autores:	Campisano, S. U., Gyulai, J., E-MRS Spring Conference
Formato:	Sin ejemplares
Lenguaje:
Publicado:	Amsterdam, Netherlands : North-Holland, 1992.
Colección:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. 62, no. 3

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