Electron beam interactions with solids for microscopy, microanalysis & microlithography /

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Detalles Bibliográficos
Otros Autores: Kyser, David F., Pfefferkorn Conference
Formato: Libro
Lenguaje:
Publicado: O´Hare : Scanning Electron Microscopy, c1984.
Descripción
Notas:"Proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA".
Descripción Física:xii, 372 p. : il.
ISBN:0931288304