Electron beam interactions with solids for microscopy, microanalysis & microlithography /
Guardado en:
Otros Autores: | , |
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Formato: | Libro |
Lenguaje: | |
Publicado: |
O´Hare :
Scanning Electron Microscopy,
c1984.
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Notas: | "Proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA". |
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Descripción Física: | xii, 372 p. : il. |
ISBN: | 0931288304 |