Electron beam interactions with solids for microscopy, microanalysis & microlithography /

Electron beam interactions with solids for microscopy, microanalysis & microlithography /

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Detalles Bibliográficos
Otros Autores:	Kyser, David F., Pfefferkorn Conference
Formato:	Libro
Lenguaje:	Inglés
Publicado:	O´Hare : Scanning Electron Microscopy, c1984.

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