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901101s1991####njua#####b####001#0#eng## |
| 005 |
20061031133746.0 |
| 001 |
BCCAB012822 |
| 003 |
AR-BCCAB |
| 245 |
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|a Handbook of VLSI microlithography :
|b principles, technology, and applications /
|c edited by William B. Glendinning, John N. Helbert.
|
| 260 |
# |
# |
|a Park Ridge, N.J., U.S.A. :
|b Noyes Publications,
|c c1991.
|
| 300 |
# |
# |
|a xxii, 649 p. :
|b il. ;
|c 25 cm.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 020 |
# |
# |
|a 0815512813
|
| 080 |
# |
# |
|a 539.23
|
| 080 |
# |
# |
|a 621.382.41
|
| 650 |
# |
0 |
|a Integrated circuits
|x Very large scale integration.
|
| 650 |
# |
0 |
|a Microlithography.
|
| 700 |
1 |
# |
|a Glendinning, William B.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Helbert, John N.,
|e ed.
|4 edt
|
| 490 |
1 |
# |
|a Materials science and process technology series
|
| 040 |
# |
# |
|a DLC
|c DLC
|d DLC
|b spa
|d arbccab
|
| 856 |
4 |
2 |
|3 Reseña
|u http://www.loc.gov/catdir/description/wap041/90023646.html
|
| 942 |
# |
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|c BK
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| 952 |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 15089
|o 539.23 G485
|p 15089
|t 1
|y BK
|
