Handbook of VLSI microlithography : principles, technology, and applications /

Handbook of VLSI microlithography : principles, technology, and applications /

Guardado en:

Detalles Bibliográficos
Otros Autores:	Glendinning, William B., ed., Helbert, John N., ed.
Formato:	Libro
Lenguaje:
Publicado:	Park Ridge, N.J., U.S.A. : Noyes Publications, c1991.
Colección:	Materials science and process technology series
Materias:	Integrated circuits > Very large scale integration. Microlithography.
Acceso en línea:	Reseña

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