High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology /

High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology /

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Detalles Bibliográficos
Autor principal:	Orloff, Jon.
Otros Autores:	Swanson, Lynwood, 1934-, Utlaut, Mark William, 1949-
Formato:	Libro
Lenguaje:
Publicado:	New York : Kluwer Academic/Plenum Publishers, c2003.
Materias:	Focused ion beams > Industrial applications. Ion bombardment > Industrial applications.
Acceso en línea:	Indice

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