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|a Microlitography :
|b High integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil Aug 28-Sept 1, 1989 /
|c Editors, Aldo Craievich, G. Gerson Bezerra de Souza [y] Victor Baranauskas.
|
| 260 |
# |
# |
|a Singapore :
|b World Scientific,
|c 1990.
|
| 300 |
# |
# |
|a viii, 184 p. :
|b fig.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 020 |
# |
# |
|a 9810201370
|
| 111 |
2 |
# |
|a Workshop Microlitography: High integration in microelectronics
|n (1st :
|d 1990 :
|c Rio de Janeiro, Brazil)
|
| 080 |
# |
# |
|a 621.382
|
| 650 |
# |
7 |
|a Technology utilization
|2 inist
|
| 650 |
# |
7 |
|a Semiconductor devices
|2 inist
|
| 650 |
# |
7 |
|a Congresses.
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 700 |
1 |
# |
|a Craievich, Aldo,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Souza, G. Gerson Bezerra de,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Baranauskas, Vitor,
|e ed.
|4 edt
|
| 040 |
# |
# |
|a arbccab
|b spa
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|a ARBCCAB
|b ARBCCAB
|i 13465
|o 621.382:061.3 W892 1989
|p 13465
|t 1
|y BK
|
