Microlitography : High integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil Aug 28-Sept 1, 1989 /

Microlitography : High integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil Aug 28-Sept 1, 1989 /

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Detalles Bibliográficos
Autor principal:	Workshop Microlitography: High integration in microelectronics (1st : 1990 : Rio de Janeiro, Brazil)
Autor Corporativo:	Workshop Microlitography: High integration in microelectronics
Otros Autores:	Craievich, Aldo, ed., Souza, G. Gerson Bezerra de, ed., Baranauskas, Vitor, ed.
Formato:	Libro
Lenguaje:
Publicado:	Singapore : World Scientific, 1990.
Materias:	Technology utilization Semiconductor devices Congresses. Congresos.

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